Miniature and Micro Mass Spectrometry for Nanoscale Sensing Applications: An Overview

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Miniature and Micro Mass Spectrometry for Nanoscale Sensing Applications: An Overview

September 11, 2021 Physical Science 0

In recent years, it has been possible to use small and/or microscale versions of more conventional mass spectrometers. As a result, small analytical instruments for ‘in the field’ sensing applications in aerospace, environmental monitoring, medical diagnostics, and process control have been created. This chapter examines the concepts that guide the creation of small quadrupole mass spectrometers. Two alternative microfabrication technologies are compared to a traditional QMS for residual gas analysis in the range of 1-100 Da. Two fabrication methods for small QMS realisation are described, as well as the fundamental concepts of QMS operation.

Author (S) Details

S. Taylor
Department of Electrical Engineering and Electronics, University of Liverpool, Liverpool, L69 3GJ, England, UK.

Dr. N. France
Department of Electrical Engineering and Electronics, University of Liverpool, Liverpool, L69 3GJ, England, UK.

View Book :- https://stm.bookpi.org/NUPSR-V14/article/view/3167

 

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