Phase Identification by Analyzed Transmission Electron Microscopy
Transmission electron microscopy (TEM) is very powerful technique for materials characterization,
providing information relating to morphology, composition, and crystal structure. Selected area
diffraction patterns (SADPs) are crystallographic data that can be obtained using a TEM instrument.
Conventional identification through SADP/TEM is tricky and tedious, thereby increasing the difficulty
of phase identification. To establish a procedure for phase identification of known and unknown
phases, in this study we examined two samples: one, a known phase, being Si with <100> alignment;
the other, unknown, was the TixOy phase at the 96.4Au-3Ni-0.6Ti interlayer/yttria-stabilized zirconia
(YSZ) interface of a steel/96.4Au-3Ni-0.6Ti interlayer/YSZ joint. The procedures for phase
identification of the known and unknown phases are described herein using a series of SADPs and
energy dispersive spectrometry within TEMthat would be useful for general researchers.
Taiwan Semiconductor Research Institute, National Applied Research Laboratories, Hsinchu 300, Taiwan.
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