Gas Sensing Properties of Nanocrystalline Silicon Carbide Films: Experimental Results

The impact of the air environment on the electrical conductivity of nanocrystalline thin SiC films formed on sapphire by direct ion deposition was studied. Gas sensitivity studies were performed on two series of nc-SiC films with distinct structures: the first series was monopolytypic and comprised mostly 3C-SiC polytype nanocrystals, while the second series was a…
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February 23, 2022 0