Cross-Sectional TEM Specimen Preparation for W/B4C Multilayer Sample Using FIB: A Recent Study

It is now possible to construct a cross-sectional transmission electron microscopy (TEM) specimen of a thin film multilayer sample using a cross-beam scanning electron microscopy (SEM)/focused-ion-beam (FIB) system, which was recently introduced. A 300 layer pair thin-film multilayer sample of W/B4C was used to show the specimen lift-out approach, which took substantially less time than…
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August 2, 2021 0