Determining the Effect of Annealing on the Crystal Structure of CoSi2/Si (100) Formed by MBE, SSE and RE Epitaxy Techniques

The paper presents original experimental results related to the study of the effect of annealing on the crystal structure of the surface of silicon doped with cobalt ions. The findings of research on CoSi2/Si(100) epitaxial structures formed by molecular beam epitaxy (MBE), solid phase epitaxy (SPE), and other techniques are presented. It has been established…
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July 20, 2021 0